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Properties of Metal Silicides by Karen Maex, Marc Van Rossum

By Karen Maex, Marc Van Rossum

The homes of silicon alloyed with metals are awarded the following for silicides of either transition and infrequent earth metals.

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This hexagonal lattice is closely related (in both the lattice type and the lattice parameter) to the silicon lattice. This means that during deposition of RE silicide thin films onto a silicon substrate it is possible to obtain a sharp, stable and defect-free RE disilicide/Si interface. The GdSi2 type can be considered as an orthorhombic deformation of the tetragonal ThSi2 type or distorted AlB2 type. Silicon-rich Yb silicides display the distorted AlB2 type structure for compositions like YbSi18 whilst for slightly lower Si concentrations the crystal structure is of the hexagonal Th3Pd5 type.

3 Thermal properties of TM silicides M. Ostling and C. Zaring May 1995 A INTRODUCTION Information about the thermal properties of the transition metal silicides is important since they reveal the materials behaviour during subsequent processing at elevated temperature. In this Datareview data are presented on the melting points of the respective silicides, their thermal linear expansion coefficient, their thermal conductivity and finally their specific heat. B MELTING POINTS OF TRANSITION METAL SILICIDES TABLE 1 gives the melting points of the transition metal silicides.

The melting point data are taken from [21]. Silicides are listed only when sufficient data exist. TABLE 1 Heats of formation (250C) and melting points of transition metal silicides. 5[g] 34[g] 54[g] TM (°C) 1170 2130 1920 1570 1500 1650 1925 2180 2215 2250* 2210* 1620 2083 2480 NP 2320 2142 1543 * for high temperature phase. Reference code: [a] = [15]; [b] = [2]; [c] = [16]; [d] = [17]; [e] = [18]; [f| = [19]; [g] = [I]; [h] = [20]; NP = not present in the equilibrium phase diagram.

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