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SiGe and Si Strained-Layer Epitaxy for Silicon by John D. Cressler

By John D. Cressler

What turns out regimen at the present time used to be no longer consistently so. the sphere of Si-based heterostructures rests solidly at the shoulders of fabrics scientists and crystal growers, these purveyors of the semiconductor “black arts” linked to the deposition of pristine motion pictures of nanoscale dimensionality onto huge, immense Si wafers with close to endless precision. we will be able to now develop near-defect loose, nanoscale movies of Si and SiGe strained-layer epitaxy appropriate with traditional high-volume silicon built-in circuit production. SiGe and Si Strained-Layer Epitaxy for Silicon Heterostructure units tells the fabrics aspect of the tale and information the various advances within the Si-SiGe strained-layer epitaxy for machine functions. Drawn from the excellent and well-reviewed Silicon Heterostructure guide, this quantity defines and info the numerous advances within the Si/SiGe strained-layer epitaxy for machine functions. Mining the skills of a world panel of specialists, the e-book covers sleek SiGe epitaxial development recommendations, epi defects and dopant diffusion in skinny motion pictures, balance constraints, and digital houses of SiGe, strained Si, and Si-C alloys. It comprises appendices on issues comparable to the houses of Si and Ge, the generalized Moll-Ross family, imperative charge-control family members, and pattern SiGe HBT compact version parameters.

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